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Home > Knowledge > 3.Definitions of Silicon Carbide Epitaxy > 3-5. Backside Cleanliness
3-5. Backside Cleanliness

3-5. Backside Cleanliness


Veri ed by inspecting for a uniform color to the wafer backside. Note there is a darker region near the center of
some higher doped wafers. Backside cleanliness speci ed as percent area clean.

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