3.Definitions of Silicon Carbide Epitaxy_Knowledge

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Silicon Carbide Substrate...
SiC Epitaxial Wafers
Wafer Reclaim Service
- Wafer Planarization
- Wafer Reclaim

Company Name： Xiamen Powerway Advanced Material Co., Ltd
Tel： +86-592-5601404
Fax： +86-592-5745822
E-Mail： sic@powerwaywafer.com

Address： #3007-3008, No.89, Anling,Huli Developing Zone, Xiamen,China

Home > Knowledge > 3.Definitions of Silicon Carbide Epitaxy

3-1. Large Point Defects
3-2. Scratches
3-3. Dimpling
3-4. Step Bunching
3-5. Backside Cleanliness
3-6. Edge Chips
3-7. ID Correct and Major Wafer Flat
3-8. 3C Inclusions
3-9. Comet Tails
3-10. Carrots